Interconnect Structures and Methods of Forming Same

ABSTRACT

Embodiments of the present disclosure include interconnect structures and methods of forming interconnect structures. An embodiment is an interconnect structure including a post-passivation interconnect (PPI) over a first substrate and a conductive connector on the PPI. The interconnect structure further includes a molding compound on a top surface of the PPI and surrounding a portion of the conductive connector, a top surface of the molding compound adjoining the conductive connector at an angle from about 10 degrees to about 60 degrees relative to a plane parallel with a major surface of the first substrate, the conductive connector having a first width at the adjoining top surface of the molding compound, and a second substrate over the conductive connector, the second substrate being mounted to the conductive connector.

PRIORITY CLAIM AND CROSS-REFERENCE

This application is a continuation of U.S. patent application Ser. No.14/991,426, filed on Jan. 8, 2016, entitled “Interconnect Structures andMethods of Forming Same,” which is a divisional of U.S. patentapplication Ser. No. 13/838,748, filed on Mar. 15, 2013, entitled“Interconnected Structures and Methods of Forming Same,” now U.S. Pat.No. 9,257,333, issued on Feb. 9, 2016, which claims the benefit of U.S.Provisional Application No. 61/776,684, filed on Mar. 11, 2013, entitled“Interconnect Structures and Methods of Forming Same”, whichapplications are hereby incorporated herein by reference.

This application relates to the following co-pending and commonlyassigned patent applications: Ser. No. 13/349,405, filed Jan. 12, 2012,entitled “Package on Package Interconnect Structure;” Ser. No.13/751,289, filed Jan. 28, 2013, entitled “System and Method for anImproved Fine Pitch Joint;” Ser. No. 13/868,554, filed Apr. 23, 2013,entitled “Method for Wafer Separation;” Ser. No. 13/913,599, filed Jun.10, 2013, entitled “Interconnect Joint Protective Layer Apparatus andMethod;” Ser. No. 13/914,426, filed Jun. 10, 2013, entitled“Interconnect Structures and Methods of Forming Same;” Ser. No.13/934,562, filed Jul. 3, 2013, entitled “Packaging Devices, Methods ofManufacture Thereof, and Packaging Methods” and Ser. No. 13/939,966,filed Jul. 11, 2013, entitled “Apparatus for Package Reinforcement UsingMolding Underfill.”

BACKGROUND

Semiconductor devices are used in a variety of electronic applications,such as personal computers, cell phones, digital cameras, and otherelectronic equipment, as examples. Semiconductor devices are typicallyfabricated by sequentially depositing insulating or dielectric layers,conductive layers, and semiconductor layers of material over asemiconductor substrate, and patterning the various material layersusing lithography to form circuit components and elements thereon.

The semiconductor industry continues to improve the integration densityof various electronic components (e.g., transistors, diodes, resistors,capacitors, etc.) by continual reductions in minimum feature size, whichallow more components to be integrated into a given area. These smallerelectronic components also require smaller packages that utilize lessarea than packages of the past, in some applications.

Solder ball grid arrays are also a technique sometimes used to joinsubstrate, dies or packages, with an array of solder balls deposited onthe bonding pads of a first substrate, and with a second substrate, dieor package joined at its own bonding pad sites to the first pad via thesolder balls. Solder balls may be formed on a pad as liquid solder, andthen solidified for additional processing. The environment with thesolder balls is subsequently heated to melt the solder balls and thepackages compressed to cause the solder balls to contact the upper andlower pads.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present embodiments, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIGS. 1, 2, 3, 4, 5, 6, and 7 illustrate cross-sectional views ofintermediate stages in the manufacturing of an interconnect structure inaccordance with an embodiment;

FIGS. 8A and 8B illustrate cross-sectional views of an interconnectstructure in accordance with an embodiment;

FIGS. 9A and 9B illustrate cross-sectional views of an interconnectstructure in accordance with an embodiment; and

FIG. 10 illustrates a process flow of the process illustrated in FIGS. 1through 7 in accordance with an embodiment.

DETAILED DESCRIPTION

Reference will now be made in detail to embodiments illustrated in theaccompanying drawings. Wherever possible, the same reference numbers areused in the drawings and the description to refer to the same or likeparts. In the drawings, the shape and thickness may be exaggerated forclarity and convenience. This description will be directed in particularto elements forming part of, or cooperating more directly with, methodsand apparatus in accordance with the present disclosure. It is to beunderstood that elements not specifically shown or described may takevarious forms well known to those skilled in the art. Many alternativesand modifications will be apparent to those skilled in the art, onceinformed by the present disclosure.

Reference throughout this specification to “one embodiment” or “anembodiment” means that a particular feature, structure, orcharacteristic described in connection with the embodiment is includedin at least one embodiment. Thus, the appearances of the phrases “in oneembodiment” or “in an embodiment” in various places throughout thisspecification are not necessarily all referring to the same embodiment.Furthermore, the particular features, structures, or characteristics maybe combined in any suitable manner in one or more embodiments. It shouldbe appreciated that the following figures are not drawn to scale;rather, these figures are merely intended for illustration.

Embodiments will be described with respect to a specific context, namelymaking and using interconnects useful in, for example, WLCSP assemblies.Other embodiments may also be applied, however, to other semiconductordevices, including, but not limited to, package-on-package assemblies,die-to-die assemblies, wafer-to-wafer assemblies, die-to-substrateassemblies, in assembling packaging, in processing substrates,interposers, substrates, or the like, or mounting input components,boards, dies or other components, or for connection packaging ormounting combinations of any type of integrated circuit or electricalcomponent.

FIGS. 1 through 7 are cross-sectional views of intermediate stages inthe manufacturing of an interconnect structure in accordance with anembodiment, and FIG. 9 is a process flow of the process shown in FIGS. 1through 7.

FIG. 1 illustrates an interconnect structure 100 in an intermediatestage of manufacture. The interconnector structure 100 may include asubstrate 20, a contact pad 22, a first passivation layer 24, a secondpassivation 26, a post-passivation interconnect (PPI) 28, and anoptional flux 30. Substrate 20 may comprise a semiconductor materialsuch as silicon, germanium, diamond, or the like. Alternatively,compound materials such as silicon germanium, silicon carbide, galliumarsenic, indium arsenide, indium phosphide, silicon germanium carbide,gallium arsenic phosphide, gallium indium phosphide, combinations ofthese, and the like, may also be used. Additionally, the substrate 20may comprise a silicon-on-insulator (SOI) substrate. Generally, an SOIsubstrate comprises a layer of a semiconductor material such asepitaxial silicon, germanium, silicon germanium, SOI, silicon germaniumon insulator (SGOI), or combinations thereof.

The substrate 20 may include active and passive devices (not shown inFIG. 1). As one of ordinary skill in the art will recognize, a widevariety of devices such as transistors, capacitors, resistors,combinations of these, and the like may be used to generate thestructural and functional requirements of the design for theinterconnect structure 100. The devices may be formed using any suitablemethods. Only a portion of the substrate 20 is illustrated in thefigures, as this is sufficient to fully describe the illustrativeembodiments.

The substrate 20 may also include metallization layers (not shown). Themetallization layers may be formed over the active and passive devicesand are designed to connect the various devices to form functionalcircuitry. The metallization layers may be formed of alternating layersof dielectric (e.g., low-k dielectric material) and conductive material(e.g., copper) and may be formed through any suitable process (such asdeposition, damascene, dual damascene, or the like).

The contact pad 22 may be formed over and in electrical contact with themetallization layers in order to help provide external connections tothe active and passive devices. The contact pad 22 may comprisealuminum, copper, nickel, the like, or a combination thereof. Thecontact pad 22 may be formed using a deposition process, such assputtering, to form a layer of material (not shown). Portions of thelayer of material may then be removed through a suitable process, suchas photolithographic masking and etching, to form the contact pad 22.However, any other suitable process may be utilized to form contact pad22. The contact pad 22 may be formed to have a thickness of betweenabout 0.5 μm and about 4 μm.

A first passivation layer 24 may be formed on the substrate 20 and overthe contact pad 22. The first passivation layer 24 may be made of one ormore suitable dielectric materials such as silicon oxide, siliconnitride, low-k dielectrics such as carbon doped oxides, extremely low-kdielectrics such as porous carbon doped silicon dioxide, a polymer suchas polyimide, solder resist, polybenzoxazole (PBO), benzocyclobutene(BCB), molding compound, the like, or a combination thereof. The firstpassivation layer 24 may be formed through a process such as chemicalvapor deposition (CVD), although any suitable process may be utilized,and may have a thickness between about 0.5 μm and about 30 μm. In someembodiments, a top surface of contact pad 22 and a portion of a bottomsurface of the first passivation layer 24 are substantially level.

After the first passivation layer 24 has been formed, an opening may beformed through the first passivation layer 24 to expose at least aportion of the underlying contact pad 22. This opening through the firstpassivation layer 24 to expose the portion of the underlying contact pad22 allows for physical and electrical contact between the contact pad 22and the PPI 28 (discussed further below). The opening through the firstpassivation layer 24 may be formed using a suitable photolithographicmask and etching process, although any other suitable process to exposeportions of the contact pad 22 may alternatively be used.

The second passivation layer 26 may be formed over the contact pad 22and the first passivation layer 24. The second passivation layer 26 maybe formed from a polymer such as polyimide. Alternatively, the secondpassivation layer 26 may be formed of a material similar to the materialused as the first passivation layer 24, such as silicon oxides, siliconnitrides, low-k dielectrics, extremely low-k dielectrics, BCB, PBO, thelike, or a combination thereof. The second passivation layer 26 may beformed to have a thickness between about 2 μm and about 30 μm.

After the second passivation layer 26 has been formed, another openingthrough the second passivation layer 26 to expose at least a portion ofthe underlying contact pad 22 may be made. The opening through thesecond passivation layer 26 to the underlying contact pad 22 allows forphysical and electrical contact between the contact pad 22 and the PPI28 (discussed further below). The opening through the second passivationlayer 26 may be formed using a suitable photolithographic mask andetching process, although any suitable process to expose portions of thecontact pad 22 may be used.

After the opening through the second passivation layer 26 has beenformed, the PPI 28 may be formed to extend through the secondpassivation layer 26 and to extend along the second passivation layer26. The PPI 28 may provide electrical connection between the contact pad22 and the subsequently formed connector 32 (see FIG. 2). In someembodiments, the PPI 28 may include a thin barrier layer (not shown)conformally deposited on the second passivation layer 26 and in theopening, such as by CVD, atomic layer deposition (ALD), the like, or acombination thereof. The barrier layer may comprise a nitride or anoxynitride, such as titanium nitride, titanium oxynitride, tantalumnitride, tantalum oxynitride, tungsten nitride, silicon dioxide, thelike, or a combination thereof. The conductive material of the PPI 28may be deposited over the thin barrier layer and in the opening. Theconductive material may be formed by an electro-chemical platingprocess, CVD, ALD, physical vapor deposition (PVD), the like, or acombination thereof. In an embodiment, the conductive material of thePPI 28 may comprise copper, tungsten, aluminum, silver, gold, the like,or a combination thereof. The conductive material may then be patternedto form the PPI 28. In other embodiments, the PPI 28 may be formed byfirst forming and patterning a photo resist (not shown), and thenforming the PPI 28 in the patterned photo resist. In these embodiments,after the PPI 28 is formed, the photo resist (not shown) may be removed.

After the PPI 28 has been formed, an optional flux 30 may be formed tothe PPI 28. The flux 30 may be formed on the PPI 28 to control thespread of the subsequently formed connector 32 (see FIG. 2) on the PPI28. The flux 30 tends to cause the connector 32 to remain within theregion where the flux 30 was applied. In an embodiment, the flux 30 maybe formed on the PPI 28 by dipping the PPI 28 in flux so that the flux30 may be deposited on the PPI 28. In another embodiment, the flux 30may be depositing as a paste and may be printed on the PPI 28.

FIG. 2 illustrates the formation of connector 32 (step 402) on the PPI28. The connector 32 may be a solder ball, a micro bump, a metal pillar,a controlled collapse chip connection (C4) bump, an electrolessnickel-electroless palladium-immersion gold technique (ENEPIG) formedbump, or the like. The connector 32 may comprise a conductive materialsuch as copper, aluminum, gold, nickel, silver, palladium, tin, thelike, or a combination thereof. In an embodiment in which the connector32 is a tin solder bump, the connector 32 may be formed by initiallyforming a layer of tin through such commonly used methods such asevaporation, electroplating, printing, solder transfer, ball placement,or the like. Once a layer of tin has been formed on the structure, areflow may be performed in order to shape the material into the desiredbump shape. In another embodiment, the connector 32 may be a metalpillar (such as a copper pillar) formed by a plating process and may besolder free and comprise substantially vertical sidewalls.

FIG. 3 illustrates the formation of a molding compound 34 (step 404)over the PPI 28 and the second passivation layer 26 and may be formedadjoining the connector 32. The molding compound 34 may provide lateralsupport to the connector 32 during reflow. In an embodiment, the moldingcompound 34 may be a nonconductive material, such as an epoxy, a resin,polyimide, polybenzoxazole (PBO), benzocyclobutene (BCB), a silicone, anacrylate, the like, or a combination thereof. The molding compound 34may be formed to have a top surface over, substantially level with, orbelow an apex of the connector 32.

FIG. 4 illustrates applying a mold 42 to the molding compound 34 (step406). The mold 42 may shape or mold the molding compound 34. In anembodiment, a release compound 40 may be applied to the mold 42 toprevent the molding compound 34 from adhering to the mold 42. Therelease compound 40 may comprise ethylene tetrafluoroethylene (ETFE),polytetrafluoroethylene (PTFE), the like, or a combination thereof. Inan embodiment, the mold 42 may be configured to accept one or moreconnectors 32 by way of recesses formed in the mold 42. The moldingcompound 34 may also be shaped by the mold 42 using a layer of releasecompound 40 thick enough to compress the molding compound 34 while stillseparating the mold 42 from the connector 32. In an embodiment, the mold42 may be used to pressure mold the molding compound 34 to force themolding compound into openings and recesses, and may avoid air pocketsor the like in the molding compound 34.

After the application of the mold 42 and the release compound 40, themolding compound may be cured (step 408) and the mold 42 and the releasecompound 40 may be removed as illustrated in FIG. 5. In someembodiments, the molding compound 34 may be applied while substantiallyliquid, and then may be cured through a chemical reaction, such as in anepoxy or resin. In some other embodiments the molding compound 34 may bean ultraviolet (UV) cured polymer applied as a gel or malleable solidcapable of being disposed on the PPI 28 and second passivation layer 26and around or conforming to the connector 32 surface.

As illustrated in FIG. 6, the molding compound 34 may be molded over alower portion of the connector 32 so that a portion of the moldingcompound 34 reaches at least about half of the height of the connector32. In an embodiment, the molding compound 34 may have a final moldedheight from about 50 μm to about 350 μm. An upper portion of theconnector 32 may be exposed through the molding compound 34. The moldingcompound 34 is contoured to the body of the solidified connector 32during application, molding, and curing of the molding compound 34. Atop surface 34A of the molding compound 34 near the connector 32 mayhave a concave shape due to the meniscus effect of the liquid during andafter the application and curing processes of the molding compound 34.In some embodiments, the top surface 34A of the molding compound 34contacts the connector 32 at an angle 46 relative to a plane parallelwith a major surface of the substrate 20. In an embodiment, the angle 46is from about 10 degrees to about 60 degrees.

The molding compound 34 may be formed to support the connector 32 inlater processing steps, such as reflowing the connector 32 for attachinga second substrate (see FIG. 7). In such an example, the moldingcompound 34 may confine the connector 32 and prevent bridging betweenadjacent connectors during the reflow process.

After the mold 42 and the release compound 40 are removed, a plasmacleaning process may be performed (step 410) on the connector 32. Theplasma cleaning process may be used to clean the connector 32 and toremove any residual release compound 40 or molding compound 34.

FIG. 7 illustrates bonding a second substrate 50 to the connector 32(step 412). The second substrate 50 may be similar to the substrate 20as described above, although the substrate 20 and the second substrate50 need not be the same. The second substrate 50 may be a carrier, apackage substrate, an interposer, or a printed circuit board (PCB) basedon an insulating core such as a fiberglass reinforced resin core. Oneexample core material is fiberglass resin such as FR4. Alternatives forthe core material include bismaleimide-triazine (BT) resin, oralternatively, other PCB materials or films. Build up films such asAjinomoto build-up film (ABF) or other laminates may be used for secondsubstrate 50.

The second substrate 50 has a bond pad 52 which will be physically andelectrically coupled to the connector 32. In some embodiments, the bondpad 52 may comprise a pre-solder layer, and in other embodiments, thebond pad 52 may comprise a contact pad or an under bump metallization(UBM). The bond pad 52 may comprise copper, nickel, aluminum, gold,silver, tin, the like, or a combination thereof. In an embodiment, thesecond substrate 50 may be bonded to the connector 32 by a reflowprocess. During this reflow process, the bond pad 52 on the secondsubstrate 50 is in contact with the connector 32 to physically andelectrically couple the second substrate 50 to the PPI 28. The connector32 bonded to the bond pad 52 of the second substrate 50 may also bereferred to as a bonding structure 32. In an embodiment, the secondsubstrate 50 has a standoff height H₁ from the top surface 34A of themolding compound 34 from about 20 μm to about 150 μm.

As illustrated in FIG. 7, the connector 32 has a width W₁ at the topsurface 34A of the molding compound 34 and the bond pad 52 has a widthW₂. In an embodiment, the ratio of W₁ to W₂ may be from about 1:1 toabout 1.2:1. For example, if the width W₂ of the bond pad 52 were 150μm, then width W₁ of the connector 32 at the top surface 34A of themolding compound 34 is in the range from 150 μm to about 180 μm.

The number of connectors 32, the number of bond pads 52, the number ofPPIs 28, and the number of contact pads 22 in FIG. 7 are only forillustrative purposes and are not limiting. There could be any suitablenumber of connectors 32, bond pads 52, PPIs 28, and contact pads 22

FIG. 8A illustrates a cross-sectional view of an interconnect structure200 with a third passivation layer 60 on the second passivation layer 26and the PPI 28. Details regarding this embodiment that are similar tothose for the previously described embodiment will not be repeatedherein.

The substrate 20, the contact pad 22, the first passivation layer 24,the second passivation layer 26, the PPI 28 may be similar to thosedescribed above and the descriptions will not be repeated herein. Theconnector 64 may be similar to the connector 32 described above and thedescription will not be repeated herein, although the connectors 64 and32 need not be the same. The manufacture of interconnect structure 200may be similar to interconnect structure 100 in FIGS. 1 and 2.

After the formation of the connector 64, a third passivation layer 60may be formed on the second passivation layer 26 and the PPI 28 andsurrounding a lower portion of the connector 64. The third passivationlayer 60 may be formed from a polymer such as polyimide. Alternatively,the third passivation layer 60 may be formed of silicon oxides, siliconnitrides, low-k dielectrics, extremely low-k dielectrics, BCB, PBO, thelike, or a combination thereof. The third passivation layer 60 may beformed to have a thickness between about 2 μm and about 30 μm.

After the third passivation layer 60 has been formed, a molding compound62 may be formed on the third passivation layer 60 and surrounding amiddle portion of the connector 64. The molding compound 62 may besimilar to the molding compound 34 described above except that it isformed on the third passivation layer 60 rather than the PPI 28 and thesecond passivation layer 26 and the description of the molding compoundwill not be repeated. The molding compound may undergo similarprocessing as molding compound 34 such as pressure molding, curing, andplasma cleaning as described above. In some embodiments, the pressuremolding and curing of the molding compound 62 may cause a portion 62B ofmolding compound 62 to fill between the connector 64 and the thirdpassivation layer 60.

As illustrated in FIG. 8A, a top surface 62A of the molding compound 62near the connector 64 may have a concave shape due to the meniscuseffect of the liquid during and after the application and curingprocesses of the molding compound 62. In some embodiments, the topsurface 62A of the molding compound 62 contacts the connector 64 at anangle 66 relative to a plane parallel with a major surface of thesubstrate 20. In an embodiment, the angle 66 is from about 10 degrees toabout 60 degrees.

FIG. 8B illustrates the bonding of a second substrate 50 to theconnector 64. This bonding process was previously described and thedescription will not be repeated herein. Second substrate 50 and bondpad 52 have been previously described and the descriptions will not berepeated herein. In an embodiment, the second substrate 50 has astandoff height H₂ from the top surface 34A of the molding compound 34from about 20 μm to about 150 μm. As illustrated in FIG. 8B, theconnector 64 has a width W₃ at the top surface 62A of the moldingcompound 62 and the bond pad 52 has a width W₄. In an embodiment, theratio of W₃ to W₄ may be from about 1:1 to about 1.2:1.

FIG. 9A illustrates a cross-sectional view of an interconnect structure300 with a under bump metallization (UBM) 70 between the connector 72and the PPI 28. Details regarding this embodiment that are similar tothose for the previously described embodiment will not be repeatedherein.

The substrate 20, the contact pad 22, the first passivation layer 24,the second passivation layer 26, the PPI 28, and the third passivationlayer 60 may be similar to those described above and the descriptionswill not be repeated herein. The connector 72 may be similar to theconnector 32 described above and the description will not be repeatedherein, although the connectors 72 and 32 need not be the same. Themanufacture of interconnect structure 300 may be similar to interconnectstructure 100 in FIG. 1.

After the formation of PPI 28, the third passivation layer 60 may beformed on the second passivation layer 26 and the PPI 28. The thirdpassivation layer 60 was previously described and the description willnot be repeated herein.

After the third passivation layer 60 has been formed, a UBM 70 may beformed on the PPI 28. An opening (not shown) may be formed through thethird passivation layer 60 to expose at least a portion of the PPI 28 toallow for electrical and physical contact between the UBM 70 and the PPI28. The opening may be formed using a suitable photolithographic maskand etching process, although any suitable process to expose a portionof the PPI 28 may be used.

After the opening is formed through the third passivation layer 60, theUBM 70 may be formed along the third passivation layer 60 and in theopening over the PPI 28. In an embodiment the UBM 70 may comprise threelayers of conductive materials, such as a layer of titanium, a layer ofcopper, and a layer of nickel. However, one of ordinary skill in the artwill recognize that there are many suitable arrangements of materialsand layers, such as an arrangement of chrome/chrome-copperalloy/copper/gold, an arrangement of titanium/titanium tungsten/copper,or an arrangement of copper/nickel/gold, that are suitable for theformation of the UBM 70. Any suitable materials or layers of materialthat may be used for the UBM 70 are fully intended to be included withinthe scope of the current application. In some embodiments, the PPI 28may be formed as a UBM 28 (not shown) in a similar manner as describedabove for UBM 70. In these embodiments, the UBM 70 may be formed incontact with the UBM 28.

After the UBM 70 is formed, a connector 72 may be formed on the UBM 70to electrically couple the connector 72 to the PPI 28. The connector 72may be similar to the connectors 32 and 64 described above and thedescription will not be repeated herein.

After the connector 72 has been formed, a molding compound 68 may beformed on the third passivation layer 60 and surrounding the UBM 70 anda lower portion of the connector 72. The molding compound 68 may besimilar to the molding compound 34 described above except that it isformed on the third passivation layer 60 rather than the PPI 28 and thesecond passivation layer 26 and the description of the molding compoundwill not be repeated. The molding compound may undergo similarprocessing as molding compound 34 such as pressure molding, curing, andplasma cleaning as described above.

As illustrated in FIG. 9A, a top surface 68A of the molding compound 68near the connector 72 may have a concave shape due to the meniscuseffect of the liquid during and after the application and curingprocesses of the molding compound 68. In some embodiments, the topsurface 68A of the molding compound 68 contacts the connector 72 at anangle 74 relative to a plane parallel with a major surface of thesubstrate 20. In an embodiment, the angle 74 is from about 10 degrees toabout 60 degrees.

FIG. 9B illustrates the bonding of a second subtract 50 to the connector72. This bonding process was previously described and the descriptionwill not be repeated herein. Second substrate 50 and bond pad 52 havebeen previously described and the descriptions will not be repeatedherein. In an embodiment, the second substrate 50 has a standoff heightH₃ from the top surface 68A of the molding compound 68 from about 20 μmto about 150 μm. As illustrated in FIG. 9B, the connector 72 has a widthW₅ at the top surface 68A of the molding compound 68 and the bond pad 52has a width W₆. In an embodiment, the ratio of W₅ to W₆ may be fromabout 1:1 to about 1.2:1.

It has been found that the molding compound 34 surrounding theconnectors 32 and/or the bonding structures 32 protects their shape andreduces the stress between the connectors/bonding structures and theunderlying interconnect. Further, the molding compound 34 protects theunderlying structures such as the PPI 28, the passivation layers 24 and26, the contact pad 22, and the substrate 20 from the stresses of laterprocessing steps. This protection afforded by the molding compound 34results in improved the reliability of the interconnect structure,especially for larger dies and chips.

In an embodiment, a method includes: forming a contact pad on a topsurface of a first substrate; depositing a first passivation layer onthe top surface of the first substrate, the first passivation layercontacting a first portion of a top surface of the contact pad;depositing a second passivation layer on the first passivation layer,the second passivation layer contacting a second portion of the topsurface of the contact pad; forming a post-passivation interconnect(PPI) extending along a top surface of the second passivation layer andextending through the second passivation layer to contact the topsurface of the contact pad; forming a connector on the top surface ofthe PPI; forming a molding compound on the top surface of the PPI andaround the connector, a topmost surface of the molding compound beingbelow an upper portion of the connector; after the forming the moldingcompound, shaping the molding compound such that the molding compoundcovers a middle portion of the connector, the upper portion of theconnector extending above the molding compound; and bonding a bond padof a second substrate to the connector, the bond pad having a secondwidth, the connector having a first width at an adjoining top surface ofthe molding compound.

In some embodiments of the method, a top surface of the molding compoundadjoins the connector at an angle from about 10 degrees to about 60degrees relative to a plane parallel with a major surface of the firstsubstrate. In some embodiments, the method further includes: depositinga third passivation layer on a top surface of the PPI, the thirdpassivation layer physically contacting a lower portion of theconnector, the molding compound formed on a top surface of the thirdpassivation layer. In some embodiments, the method further includes:forming a first under bump metallization (UBM) extending through thethird passivation layer to contact the PPI, the first UBM contacting theconnector and the PPI. In some embodiments of the method, a ratio of thefirst width to the second width is from 1:1 to about 1.2:1. In someembodiments of the method, a distance between the top surface of themolding compound and the top surface of the second substrate is fromabout 20 μm to about 150 μm.

In an embodiment, a method includes: forming a post-passivationinterconnect (PPI) over a first substrate; forming a conductiveconnector contacting the PPI; forming a molding compound over the PPIand surrounding a portion of the conductive connector, a top surface ofthe molding compound being below an apex of the conductive connector, afirst portion of the top surface of the molding compound adjoining theconductive connector at a first angle relative to a plane parallel witha major surface of the first substrate; after the forming the moldingcompound, shaping the molding compound such that the first portion ofthe top surface of the molding compound adjoins the conductive connectorat a second angle relative to the plane parallel with the major surfaceof the first substrate, the second angle being greater than the firstangle; and bonding a second substrate to the conductive connector.

In some embodiments of the method, the forming the molding compoundfurther includes: forming a release compound on a pressure mold; andapplying the pressure mold to form the molding compound around theconductive connector. In some embodiments, the method further includes:forming a contact pad on a top surface of the first substrate; forming afirst passivation layer on the top surface of the first substrate, thefirst passivation layer being on a portion of a top surface of thecontact pad; and forming a second passivation layer on the firstpassivation layer, the second passivation layer being on a portion ofthe top surface of the contact pad, the PPI being on a top surface ofthe second passivation layer. In some embodiments, the method furtherincludes: forming a third passivation layer on a top surface of the PPI,the third passivation layer surrounding a lower portion of theconductive connector; and forming the molding compound a top surface ofthe third passivation layer. In some embodiments of the method, afterthe forming the molding compound, a portion of the molding compound islaterally between the third passivation layer and the conductiveconnector. In some embodiments of the method, the second angle is fromabout 10 degrees to about 60 degrees. In some embodiments of the method,the bonding the second substrate further includes: providing a secondsubstrate including a bond pad, the bond pad having a second width; andbonding the bond pad to the conductive connector. In some embodiments ofthe method, the conductive connector has a first width at the adjoiningtop surface of the molding compound, a ratio of the first width to thesecond width being from 1:1 to about 1.2:1. In some embodiments of themethod, a distance between the top surface of the molding compound andthe top surface of the second substrate is from about 20 μm to about 150μm. In some embodiments of the method, the molding compound includes anepoxy, a polyimide, polybenzoxazole, or a combination thereof.

In an embodiment, a method includes: forming a first bonding padelectrically connected to active devices of a substrate; forming a firstpassivation layer adjacent the substrate; forming a post-passivationinterconnect (PPI) extending through the first passivation layer tocontact the first bonding pad; forming a conductive connectorelectrically connected to the PPI; forming a molding compound around afirst portion of the conductive connector, a first portion of a topsurface of the molding compound adjoining the conductive connector at afirst angle relative to a plane parallel with a major surface of thesubstrate; after the forming the molding compound, shaping the moldingcompound to increase the first angle; and bonding a second bonding padto the conductive connector.

In some embodiments, the method further includes: forming a secondpassivation layer around a second portion of the conductive connector,the second passivation layer disposed between the molding compound andthe first passivation layer. In some embodiments, the method furtherincludes: forming a first under bump metallization (UBM) extendingthrough the second passivation layer to contact the PPI, the first UBMcontacting the conductive connector and the PPI. In some embodiments ofthe method, the first angle is from about 10 degrees to about 60 degreesafter shaping the molding compound.

Although the present embodiments and their advantages have beendescribed in detail, it should be understood that various changes,substitutions, and alterations can be made herein without departing fromthe spirit and scope of the disclosure as defined by the appendedclaims. Moreover, the scope of the present application is not intendedto be limited to the particular embodiments of the process, machine,manufacture, composition of matter, means, methods, and steps describedin the specification. As one of ordinary skill in the art will readilyappreciate from the disclosure, processes, machines, manufacture,compositions of matter, means, methods, or steps, presently existing orlater to be developed, that perform substantially the same function orachieve substantially the same result as the corresponding embodimentsdescribed herein may be utilized according to the present disclosure.Accordingly, the appended claims are intended to include within theirscope such processes, machines, manufacture, compositions of matter,means, methods, or steps.

What is claimed is:
 1. A method comprising: forming a contact pad on atop surface of a first substrate; depositing a first passivation layeron the top surface of the first substrate, the first passivation layercontacting a first portion of a top surface of the contact pad;depositing a second passivation layer on the first passivation layer,the second passivation layer contacting a second portion of the topsurface of the contact pad; forming a post-passivation interconnect(PPI) extending along a top surface of the second passivation layer andextending through the second passivation layer to contact the topsurface of the contact pad; forming a connector on the top surface ofthe PPI; forming a molding compound on the top surface of the PPI andaround the connector, a topmost surface of the molding compound beingbelow an upper portion of the connector; after the forming the moldingcompound, shaping the molding compound such that the molding compoundcovers a middle portion of the connector, the upper portion of theconnector extending above the molding compound; and bonding a bond padof a second substrate to the connector, the bond pad having a secondwidth, the connector having a first width at an adjoining top surface ofthe molding compound.
 2. The method of claim 1, wherein a top surface ofthe molding compound adjoins the connector at an angle from about 10degrees to about 60 degrees relative to a plane parallel with a majorsurface of the first substrate.
 3. The method of claim 1 furthercomprising: depositing a third passivation layer on a top surface of thePPI, the third passivation layer physically contacting a lower portionof the connector, the molding compound formed on a top surface of thethird passivation layer.
 4. The method of claim 3, further comprising:forming a first under bump metallization (UBM) extending through thethird passivation layer to contact the PPI, the first UBM contacting theconnector and the PPI.
 5. The method of claim 1, wherein a ratio of thefirst width to the second width is from 1:1 to about 1.2:1.
 6. Themethod of claim 1, wherein a distance between the top surface of themolding compound and the top surface of the second substrate is fromabout 20 μm to about 150 μm.
 7. A method comprising: forming apost-passivation interconnect (PPI) over a first substrate; forming aconductive connector contacting the PPI; forming a molding compound overthe PPI and surrounding a portion of the conductive connector, a topsurface of the molding compound being below an apex of the conductiveconnector, a first portion of the top surface of the molding compoundadjoining the conductive connector at a first angle relative to a planeparallel with a major surface of the first substrate; after the formingthe molding compound, shaping the molding compound such that the firstportion of the top surface of the molding compound adjoins theconductive connector at a second angle relative to the plane parallelwith the major surface of the first substrate, the second angle beinggreater than the first angle; and bonding a second substrate to theconductive connector.
 8. The method of claim 7 wherein the forming themolding compound further comprises: forming a release compound on apressure mold; and applying the pressure mold to form the moldingcompound around the conductive connector.
 9. The method of claim 7further comprising: forming a contact pad on a top surface of the firstsubstrate; forming a first passivation layer on the top surface of thefirst substrate, the first passivation layer being on a portion of a topsurface of the contact pad; and forming a second passivation layer onthe first passivation layer, the second passivation layer being on aportion of the top surface of the contact pad, the PPI being on a topsurface of the second passivation layer.
 10. The method of claim 9further comprising: forming a third passivation layer on a top surfaceof the PPI, the third passivation layer surrounding a lower portion ofthe conductive connector; and forming the molding compound a top surfaceof the third passivation layer.
 11. The method of claim 10, whereinafter the forming the molding compound, a portion of the moldingcompound is laterally between the third passivation layer and theconductive connector.
 12. The method of claim 10, wherein the secondangle is from about 10 degrees to about 60 degrees.
 13. The method ofclaim 7, wherein the bonding the second substrate further comprises:providing a second substrate comprising a bond pad, the bond pad havinga second width; and bonding the bond pad to the conductive connector.14. The method of claim 13, wherein the conductive connector has a firstwidth at the adjoining top surface of the molding compound, a ratio ofthe first width to the second width being from 1:1 to about 1.2:1. 15.The method of claim 7, wherein a distance between the top surface of themolding compound and the top surface of the second substrate is fromabout 20 μm to about 150 μm.
 16. The method of claim 7, wherein themolding compound comprises an epoxy, a polyimide, polybenzoxazole, or acombination thereof.
 17. A method comprising: forming a first bondingpad electrically connected to active devices of a substrate; forming afirst passivation layer adjacent the substrate; forming apost-passivation interconnect (PPI) extending through the firstpassivation layer to contact the first bonding pad; forming a conductiveconnector electrically connected to the PPI; forming a molding compoundaround a first portion of the conductive connector, a first portion of atop surface of the molding compound adjoining the conductive connectorat a first angle relative to a plane parallel with a major surface ofthe substrate; after the forming the molding compound, shaping themolding compound to increase the first angle; and bonding a secondbonding pad to the conductive connector.
 18. The method of claim 17,further comprising: forming a second passivation layer around a secondportion of the conductive connector, the second passivation layerdisposed between the molding compound and the first passivation layer.19. The method of claim 18, further comprising: forming a first underbump metallization (UBM) extending through the second passivation layerto contact the PPI, the first UBM contacting the conductive connectorand the PPI.
 20. The method of claim 18, wherein the first angle is fromabout 10 degrees to about 60 degrees after shaping the molding compound.